Nanometer resolution TEM sample manipulator for rotational and translational positioning
نویسندگان
چکیده
The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 m range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.
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تاریخ انتشار 2011